Design and Manufacturing of 3D Optical Nano Profilometer
Our project supported by TÜBİTAK within the scope of the 1501 Industrial R&D Support Program
The nanometer optical profilometer operates based on the interference of light waves in the two-phase transfer interferometer mode and the microscopic interferometer of white light. In the phase transfer interferometry mode, the light source spectrum is monochromatic, and data is generated from the sample by changing the phase difference of the two interfering beams, providing three-dimensional surface information. Within our project, an optical nano profilometer device is being developed that can perform surface roughness, waviness, and thickness measurements in the nano-scale with a single analysis.